Microcomposite and Nanocomposite Structures from Chemical Vapor Deposition in the Silicon–Titanium–Carbon System
Muriel Touanen, Francis Teyssandier, Michel Ducarroir, Mohammed Maline, Roger Hillel, Jean Luc DerepVolume:
76
Year:
1993
Language:
english
Pages:
9
DOI:
10.1111/j.1151-2916.1993.tb03928.x
File:
PDF, 945 KB
english, 1993