High-Temperature Oxidation of Chemically Vapor-Deposited...

Journal of the American Ceramic Society 1994 Vol. 77; Iss. 11

High-Temperature Oxidation of Chemically Vapor-Deposited Silicon Nitride in a Carbon Monoxide-Carbon Dioxide Atmosphere

Takayuki Narushima, Takashi Goto, Jun Hagiwara, Yasutaka Iguchi, Toshio Hirai
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Volume:
77
Year:
1994
Language:
english
Pages:
5
DOI:
10.1111/j.1151-2916.1994.tb04525.x
File:
PDF, 509 KB
english, 1994
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