High-Temperature Active Oxidation and Active-to-Passive...

Journal of the American Ceramic Society 1994 Vol. 77; Iss. 9

High-Temperature Active Oxidation and Active-to-Passive Transition of Chemically Vapor-Deposited Silicon Nitride in N2–O2 and Ar–O2 Atmospheres

Takayuki Narushima, Takashi Goto, Yoshio Yokoyama, Jun Hagiwara, Yasutaka Iguchi, Toshio Hirai
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Volume:
77
Year:
1994
Language:
english
Pages:
7
DOI:
10.1111/j.1151-2916.1994.tb04607.x
File:
PDF, 546 KB
english, 1994
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