Strain Tolerant Porous Silicon Nitride

Journal of the American Ceramic Society 1997 Vol. 80; Iss. 2

Strain Tolerant Porous Silicon Nitride

Yasuhiro Shigegaki, Manuel E. Brito, Kiyoshi Hirao, Motohiro Toriyama, Shuzo Kanzaki
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Volume:
80
Year:
1997
Language:
english
Pages:
4
DOI:
10.1111/j.1151-2916.1997.tb02856.x
File:
PDF, 109 KB
english, 1997
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