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Silicon Carbide Membranes Modified by Chemical Vapor Deposition Using Species of Low Sticking Coefficients in a Silane/Acetylene Reaction System
Lang-Luen Lee, Dah-Shyang TsaiVolume:
81
Year:
1998
Language:
english
Pages:
7
DOI:
10.1111/j.1151-2916.1998.tb02308.x
File:
PDF, 679 KB
english, 1998