Raman Microprobe Evaluation of Bridging Stresses in Highly Anisotropic Silicon Nitride
Giuseppe Pezzotti, Hiroyuki Ichimaru, Luca Paolo Ferroni, Kiyoshi Hirao, Orfeo SbaizeroVolume:
84
Year:
2001
Language:
english
Pages:
6
DOI:
10.1111/j.1151-2916.2001.tb00915.x
File:
PDF, 427 KB
english, 2001