Hydride Vapor Phase Epitaxy of GaN Thick Films by the...

Journal of the American Ceramic Society 2002 Vol. 85; Iss. 1

Hydride Vapor Phase Epitaxy of GaN Thick Films by the Consecutive Deposition Process Using GaCl3

Soo Min Lee, Young Hoon Kim, Su Jin Chung
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Volume:
85
Year:
2002
Language:
english
Pages:
5
DOI:
10.1111/j.1151-2916.2002.tb00035.x
File:
PDF, 477 KB
english, 2002
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