Manufacturing Silicon Carbide Microrotors by Reactive Hot Isostatic Pressing within Micromachined Silicon Molds
Jing-Feng Li, Shinya Sugimoto, Shuji Tanaka, Masayoshi Esashi, Ryuzo WatanabeVolume:
85
Year:
2002
Language:
english
Pages:
3
DOI:
10.1111/j.1151-2916.2002.tb00077.x
File:
PDF, 383 KB
english, 2002