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Effects of Coffee-Bean-Like Morphology and Graded Interlayer on Texture Evolution of Plasma-Enhanced Chemical-Vapor-Deposited Ti-C-N Films
Jiann Shieh, Hsiao Lei Wang, Ming Shyong Tsai, Min Hsiung HonVolume:
85
Year:
2002
Language:
english
Pages:
5
DOI:
10.1111/j.1151-2916.2002.tb00143.x
File:
PDF, 1.17 MB
english, 2002