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Processing of High-Density Submicrometer Al2O3 for New Applications
Andreas Krell, Paul Blank, Hongwei Ma, Thomas Hutzler, Manfred NebelungVolume:
86
Year:
2003
Language:
english
DOI:
10.1111/j.1151-2916.2003.tb03339.x
File:
PDF, 3.09 MB
english, 2003