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Paralinear Oxidation of Silicon Nitride in a Water-Vapor/Oxygen Environment
Dennis S. Fox, Elizabeth J. Opila, QuynhGiao N. Nguyen, Donald L. Humphrey, Susan M. LewtonVolume:
86
Year:
2003
Language:
english
Pages:
6
DOI:
10.1111/j.1151-2916.2003.tb03461.x
File:
PDF, 711 KB
english, 2003