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Additive Effects on Si3N4 Oxidation/Volatilization in Water Vapor
Elizabeth J. Opila, R. Craig Robinson, Dennis S. Fox, Richard A. Wenglarz, Mattison K. FerberVolume:
86
Year:
2003
Language:
english
Pages:
10
DOI:
10.1111/j.1151-2916.2003.tb03462.x
File:
PDF, 1.87 MB
english, 2003