ChemInform Abstract: Metal—Organic CVD of Tantalum Oxide...

ChemInform 2001 Vol. 32; Iss. 5

ChemInform Abstract: Metal—Organic CVD of Tantalum Oxide from tert-Butylimidotris(diethylamido)tantalum and Oxygen.

Hsin-Tien Chiu, Chun-Nan Wang, Shiow-Huey Chuang
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Volume:
32
Year:
2001
Pages:
1
DOI:
10.1002/chin.200105252
File:
PDF, 34 KB
2001
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