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ChemInform Abstract: (Pb,Sr)TiO3 Thin Films for a ULSI DRAM Capacitor Prepared by Liquid Source Misted Chemical Deposition.
Hyun Jin Chung, Jin Hong Kim, Seong Ihl WooVolume:
32
Year:
2001
Language:
english
Pages:
1
DOI:
10.1002/chin.200135010
File:
PDF, 32 KB
english, 2001