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Amorphous Mo–N and Mo–Si–N films in microelectromechanical systems
H. KATTELUS, M. YLÖNEN, M. BLOMBERGVolume:
28
Year:
2005
Language:
english
Pages:
7
DOI:
10.1111/j.1460-2695.2005.00887.x
File:
PDF, 206 KB
english, 2005