Designing a Non-Volatile Imaging Switch for Mass-Persistent, Chemically Amplified Photolithography: A Model Study.
John M. Klopp, Nicolas Bensel, Zachary M. Fresco, Jean M. J. FrechetVolume:
34
Year:
2003
Pages:
1
DOI:
10.1002/chin.200313084
File:
PDF, 87 KB
2003