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Dual-Source Atmospheric Pressure CVD of Amorphous Molybdenum Phosphide Films on Glass Using Molybdenum(V) Chloride and Cyclohexylphosphine.
Christopher S. Blackman, Claire J. Carmalt, Troy D. Manning, Shane A. O'Neill, Ivan P. Parkin, Leonardo Apostolico, Kieran C. MolloyVolume:
34
Year:
2003
Pages:
1
DOI:
10.1002/chin.200316235
File:
PDF, 67 KB
2003