Preparation of Titanium Nitride Films from Amide Precursors...

ChemInform 2003 Vol. 34; Iss. 17

Preparation of Titanium Nitride Films from Amide Precursors Synthesized by Electrolysis.

Shiro Shimada, Marika Hasegawa
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Volume:
34
Year:
2003
Language:
english
Pages:
1
DOI:
10.1002/chin.200317007
File:
PDF, 85 KB
english, 2003
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