Fabrication and Properties of Tantalum Film Deposited on...

Fabrication and Properties of Tantalum Film Deposited on Titanium Through LP-CVD from TaCl5—H2.

Alexandra Levesque, Anne Bouteville
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Volume:
35
Year:
2004
Pages:
1
DOI:
10.1002/chin.200415219
File:
PDF, 59 KB
2004
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