Processing, Microstructure, and Properties of Laminated Silicon Nitride Stacks
Bernd Bitterlich, Jürgen G. HeinrichVolume:
88
Year:
2005
Language:
english
Pages:
9
DOI:
10.1111/j.1551-2916.2005.00512.x
File:
PDF, 1.28 MB
english, 2005