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Modeling and Experimental Analysis in Excimer-Laser Crystallization of Amorphous Si Films on a Glass Substrate with Different Buffer Layers
Yu-Ru Chen, Chien-Hung Chang, Long-Sun ChaoVolume:
90
Year:
2007
Language:
english
Pages:
5
DOI:
10.1111/j.1551-2916.2006.01386.x
File:
PDF, 398 KB
english, 2007