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Plasma-Resistant Dense Yttrium Oxide Film Prepared by Aerosol Deposition Process
Junichi Iwasawa, Ryoichi Nishimizu, Masahiro Tokita, Masakatsu Kiyohara, Keizo UematsuVolume:
90
Year:
2007
Language:
english
Pages:
6
DOI:
10.1111/j.1551-2916.2007.01738.x
File:
PDF, 799 KB
english, 2007