Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors
Ralf Riedel, Liviu Toma, Enrico Janssen, Jürgen Nuffer, Tobias Melz, Holger HanselkaVolume:
93
Year:
2010
Language:
english
Pages:
5
DOI:
10.1111/j.1551-2916.2009.03496.x
File:
PDF, 222 KB
english, 2010