Nanolaminated Alumina Coatings Deposited by Metal–Organic Chemical Vapor Deposition
Nadine K. Eils, Peter Mechnich, Martin Schmücker, Hartmut Keune, Georg Wahl, Claus-Peter KlagesVolume:
93
Year:
2010
Language:
english
Pages:
5
DOI:
10.1111/j.1551-2916.2010.03917.x
File:
PDF, 1012 KB
english, 2010