X-Ray Photoelectron Spectroscopy Study on the Interaction...

Journal of the American Ceramic Society 2011 Vol. 94; Iss. 10

X-Ray Photoelectron Spectroscopy Study on the Interaction of Yttrium–Aluminum Oxide with Fluorine-Based Plasma

Dae-Min Kim, Sang-Ho Lee, William B. Alexander, Kyeong-Beom Kim, Yoon-Suk Oh, Sung-Min Lee
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Volume:
94
Year:
2011
Language:
english
Pages:
5
DOI:
10.1111/j.1551-2916.2011.04589.x
File:
PDF, 414 KB
english, 2011
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