Interplay of Physical and Chemical Aspects in the PECVD and...

Interplay of Physical and Chemical Aspects in the PECVD and Etching of Thin Solid Films

C. Cavallotti, M. Di Stanislao, S. Carra
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Volume:
37
Year:
2006
Pages:
1
DOI:
10.1002/chin.200603223
File:
PDF, 8 KB
2006
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