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Volume 18; Issue 10
Main
Journal of Process Control
Volume 18; Issue 10
Journal of Process Control
Volume 18; Issue 10
1
Critical dimension and real-time temperature control for warped wafers
Weng Khuen Ho
,
Arthur Tay
,
Jun Fu
,
Ming Chen
,
Yong Feng
Journal:
Journal of Process Control
Year:
2008
Language:
english
File:
PDF, 318 KB
Your tags:
english, 2008
2
A 3-tier cooperative control architecture for multi-step semiconductor manufacturing process
Ziqiang Mao
,
Wei Kang
,
Frank Wang
,
Peter Raulefs
Journal:
Journal of Process Control
Year:
2008
Language:
english
File:
PDF, 334 KB
Your tags:
english, 2008
3
Design for manufacturing meets advanced process control: A survey
David Z. Pan
,
Peng Yu
,
Minsik Cho
,
Anand Ramalingam
,
Kiwoon Kim
,
Anand Rajaram
,
Sean X. Shi
Journal:
Journal of Process Control
Year:
2008
Language:
english
File:
PDF, 422 KB
Your tags:
english, 2008
4
Scheduling semiconductor manufacturing processes to enhance system identification
Alexander J. Pasadyn
,
Hyung Lee
,
Thomas F. Edgar
Journal:
Journal of Process Control
Year:
2008
Language:
english
File:
PDF, 194 KB
Your tags:
english, 2008
5
Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares
Aftab A. Khan
,
J.R. Moyne
,
D.M. Tilbury
Journal:
Journal of Process Control
Year:
2008
Language:
english
File:
PDF, 547 KB
Your tags:
english, 2008
6
One step forward from run-to-run critical dimension control: Across-wafer level critical dimension control through lithography and etch process
Qiaolin Zhang
,
Kameshwar Poolla
,
Costas J. Spanos
Journal:
Journal of Process Control
Year:
2008
Language:
english
File:
PDF, 2.66 MB
Your tags:
english, 2008
7
The Nearest Uniformity Producing Profile (NUPP) optimization criterion for thin-film processing applications
Raymond A. Adomaitis
Journal:
Journal of Process Control
Year:
2008
Language:
english
File:
PDF, 1.35 MB
Your tags:
english, 2008
8
An air-flow based wafer bake system for improved temperature uniformity
Lan Wang
,
Ai Poh Loh
,
Zhi Ming Gong
,
Siew Loong Chow
Journal:
Journal of Process Control
Year:
2008
Language:
english
File:
PDF, 452 KB
Your tags:
english, 2008
9
Editorial
S. Joe Qin
,
Weng Khuen Ho
Journal:
Journal of Process Control
Year:
2008
Language:
english
File:
PDF, 91 KB
Your tags:
english, 2008
10
Editorial Board
Journal:
Journal of Process Control
Year:
2008
Language:
english
File:
PDF, 32 KB
Your tags:
english, 2008
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