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Volume 60; Issue 9
Main
Journal of the Vacuum Society of Japan
Volume 60; Issue 9
Journal of the Vacuum Society of Japan
Volume 60; Issue 9
1
Fabrication Method for Nanocluster Superatoms with High-Power Impulse Magnetron Sputtering
TSUNOYAMA, Hironori
,
TONA, Masahide
,
TSUKAMOTO, Keizo
,
NAKAJIMA, Atsushi
Journal:
Journal of the Vacuum Society of Japan
Year:
2017
File:
PDF, 1.73 MB
Your tags:
2017
2
Development of Pulse Power Supplies as High Power Impulse Magnetron Sputtering (HiPIMS) Equipment Components for Medical Diamond Like Carbon (DLC) Film Fabrication Processes
KUROIWA, Masahide
,
NAKATANI, Tatsuyuki
Journal:
Journal of the Vacuum Society of Japan
Year:
2017
File:
PDF, 1.08 MB
Your tags:
2017
3
Guidance for the Vacuum Engineer Examination (6)
TAKAHASHI, Kazue
Journal:
Journal of the Vacuum Society of Japan
Year:
2017
File:
PDF, 234 KB
Your tags:
2017
4
Preface to the Special Issue for the High Power Impulse/Pulsed Magnetron Sputtering
NAKANO, Takeo
Journal:
Journal of the Vacuum Society of Japan
Year:
2017
File:
PDF, 204 KB
Your tags:
2017
5
Characterization of Carbon Thin Films Prepared by High Power Impulse Magnetron Sputtering
NAWACHI, Norio
,
ITOH, Koichi
,
ISAGI, Yosuke
,
YOSHIDA, Yoshiaki
,
OKAMOTO, Keishi
,
NAKATANI, Tatsuyuki
Journal:
Journal of the Vacuum Society of Japan
Year:
2017
File:
PDF, 659 KB
Your tags:
2017
6
Comparison of Plasma Ion Deposition Processes at Industrial Scale
HIROTA, Satoshi
,
CREMER, Rainer
,
TAKAHASHI, Tetsuya
Journal:
Journal of the Vacuum Society of Japan
Year:
2017
File:
PDF, 406 KB
Your tags:
2017
7
Transition Mode Control in Reactive High-Power Impulse Magnetron Sputtering (R-HiPIMS)
SHIMIZU, Tetsuhide
,
VILLAMAYOR, Michelle
,
KERAUDY, Julien
,
LUNDIN, Daniel
,
HELMERSSON, Ulf
Journal:
Journal of the Vacuum Society of Japan
Year:
2017
File:
PDF, 1.15 MB
Your tags:
2017
1
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