Volume 14; Issue 1

Microelectronic Engineering

Volume 14; Issue 1
1

Editorial Board

Journal:
Microelectronic Engineering
Year:
1991
Language:
english
File:
PDF, 79 KB
english, 1991
2

Defect generation in gate oxides during the polysilicon doping and activation process

Dervin L. Flowers
Journal:
Microelectronic Engineering
Year:
1991
Language:
english
File:
PDF, 828 KB
english, 1991
4

Dry etching of thermal SiO2 using SF6-based plasma for VLSI fabrication

Soon Fatt Yoon
Journal:
Microelectronic Engineering
Year:
1991
Language:
english
File:
PDF, 1.48 MB
english, 1991
5

Three-dimensional simulation of proximity printing

Arous Arshak, Nikhil N. Kundu, Khalil Arshak, Shri N. Gupta
Journal:
Microelectronic Engineering
Year:
1991
Language:
english
File:
PDF, 1.85 MB
english, 1991
6

Bright field alignment marks for optical lithography

U. Ablaβmeier
Journal:
Microelectronic Engineering
Year:
1991
Language:
english
File:
PDF, 740 KB
english, 1991
7

Hybrid microcircuit technology handbook: by James J. Licari and Leonard R. Enlow

André Van Calster
Journal:
Microelectronic Engineering
Year:
1991
Language:
english
File:
PDF, 70 KB
english, 1991