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Volume 191
Main
Microelectronic Engineering
Volume 191
Microelectronic Engineering
Volume 191
1
Study on imprinting and replica molding of quasi-grey scale soft mold curved surface microstructure mold
Weng, Yung-Jin
,
Tsai, Chun-Yu
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 2.49 MB
Your tags:
english, 2018
2
Beyond 100 nm resolution in 3D laser lithography — Post processing solutions
Seniutinas, G.
,
Weber, A.
,
Padeste, C.
,
Sakellari, I.
,
Farsari, M.
,
David, C.
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 2.11 MB
Your tags:
english, 2018
3
Non-contact magnetic cantilever-type piezoelectric energy harvester for rotational mechanism
Wu, Wen-Hsiang
,
Kuo, Kai-Chun
,
Lin, Yu-Hsiang
,
Tsai, Yao-Chuan
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 934 KB
Your tags:
english, 2018
4
A SPICE model of silicon tunneling field-effect transistors
Woo, Sola
,
Kim, Minsuk
,
Kim, Sangsig
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 1.66 MB
Your tags:
english, 2018
5
Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses
Rösner, Benedikt
,
Koch, Frieder
,
Döring, Florian
,
Bosgra, Jeroen
,
Guzenko, Vitaliy A.
,
Kirk, Eugenie
,
Meyer, Markus
,
Ornelas, Joshua L.
,
Fink, Rainer H.
,
Stanescu, Stefan
,
Swaraj, Sufal
,
Belkhou, Rach
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 866 KB
Your tags:
english, 2018
6
Hand-drawn variable resistor and strain sensor on paper
Zhu, Zhiyuan
,
Zhang, Hongze
,
Xia, Kequan
,
Xu, Zhiwei
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 1.29 MB
Your tags:
english, 2018
7
Development and characterization of cyclic olefin copolymer thin films and their dielectric characteristics as CPW substrate by means of Terahertz Time Domain Spectroscopy
Diaz-Albarran, L.M.
,
Lugo-Hernandez, E.
,
Ramirez-Garcia, E.
,
Enciso-Aguilar, M.A.
,
Valdez-Perez, D.
,
Cereceda-Company, P.
,
Granados, D.
,
Costa-Krämer, J.L.
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 1.20 MB
Your tags:
english, 2018
8
Development of a novel mechanical micro-engraving method for the high-aspect-ratio microstructures of an advanced window system
Gong, Jing
,
Delaunay, Antoine
,
Kostro, André
,
Schüler, Andreas
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 1.70 MB
Your tags:
english, 2018
9
Fabrication of fine metal patterns using an additive material extrusion process with a molten metal
Kim, Yeongjun
,
Lee, Junhee
,
Oh, Je Hoon
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 2.63 MB
Your tags:
english, 2018
10
Integration scheme and 3D RC extractions of three-level supervia at 16 nm half-pitch
Gupta, Anshul
,
Bömmels, Jürgen
,
Saad, Yves
,
Ciofi, Ivan
,
Wilson, Christopher J.
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 1.52 MB
Your tags:
english, 2018
11
Fabrication of the antireflection structure on aspheric lens surface and lens holder
Mano, Ichiro
,
Uchida, Tomoya
,
Taniguchi, Jun
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 2.74 MB
Your tags:
english, 2018
12
High resolution polymer coated strain sensors for in-liquid operation
Sorba, Francesca
,
Martin-Olmos, Cristina
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 1.04 MB
Your tags:
english, 2018
13
Manufacturing of highly-dispersive, high-efficiency transmission gratings by laser interference lithography and dry etching
Koch, Felix
,
Lehr, Dennis
,
Schönbrodt, Oliver
,
Glaser, Tilman
,
Fechner, Renate
,
Frost, Frank
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 1.10 MB
Your tags:
english, 2018
14
DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process
Chang, Bingdong
,
Leussink, Pele
,
Jensen, Flemming
,
Hübner, Jörg
,
Jansen, Henri
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 3.35 MB
Your tags:
english, 2018
15
Self-aligned gate-last process for quantum-well InAs transistor on insulator
Cheng, Qi
,
Wang, Zilun
,
Shariar, Kazy
,
Khandelwal, Sourabh
,
Zeng, Yuping
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 1.60 MB
Your tags:
english, 2018
16
Confined laminar flow on a super-hydrophobic surface drives the initial stages of tau protein aggregation
Moretti, Manola
,
Allione, Marco
,
Marini, Monica
,
Giugni, Andrea
,
Torre, Bruno
,
Das, Gobind
,
Di Fabrizio, Enzo
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 972 KB
Your tags:
english, 2018
17
Reactive ion etching of poly (cyclohexene carbonate) in oxygen plasma
Xue, Xingjun
,
Zhou, Kun
,
Cai, Jian
,
Wang, Qian
,
Wang, Zheyao
Journal:
Microelectronic Engineering
Year:
2018
Language:
english
File:
PDF, 2.57 MB
Your tags:
english, 2018
18
Editorial Board
Journal:
Microelectronic Engineering
Year:
2018
File:
PDF, 23 KB
Your tags:
2018
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