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Volume 20; Issue 1-2
Main
Microelectronic Engineering
Volume 20; Issue 1-2
Microelectronic Engineering
Volume 20; Issue 1-2
1
Editorial Board
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 83 KB
Your tags:
english, 1993
2
Editorial
W. Zapka
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 114 KB
Your tags:
english, 1993
3
Polymer ablation with a high-power excimer laser tool
Gerhard E. Wolbold
,
Christopher L. Tessler
,
Dawn J. Tudryn
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 784 KB
Your tags:
english, 1993
4
Laser ablation of polymers for high-density interconnect
Y.S. Liu
,
H.S. Cole
,
R. Guida
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 1.37 MB
Your tags:
english, 1993
5
Simulation of growth in pyrolytic laser-CVD of microstructures—I. One-dimensional approach
N. Arnold
,
R. Kullmer
,
D. Bäuerle
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 704 KB
Your tags:
english, 1993
6
Simulation of growth in pyrolytic laser-CVD of microstructures—II. Two-dimensional approach
N. Arnold
,
D. Bäuerle
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 709 KB
Your tags:
english, 1993
7
Laser processing of electrically conducting polymers into patterns
Joachim Bargon
,
Reinhard Baumann
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 1.34 MB
Your tags:
english, 1993
8
Modification of electrical conductivity and surface structure in polymers using ultraviolet laser radiation
H.M. Phillips
,
M.C. Smayling
,
R. Sauerbrey
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 1.24 MB
Your tags:
english, 1993
9
Progress toward excimer laser metal planarization and via hole filling using in-situ monitoring
Paul G. Carey
,
Bertram J. Woratschek
,
Friedrich Bachmann
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 1.29 MB
Your tags:
english, 1993
10
An excimer-laser-based nanosecond thermal diffusion technique for ultra-shallow pn junction fabrication
K.H. Weiner
,
P.G. Carey
,
A.M. McCarthy
,
T.W. Sigmon
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 1.90 MB
Your tags:
english, 1993
11
Microfabrication of semiconductors by means of excimer laser doping
Koichi Toyoda
,
Koji Sugioka
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 860 KB
Your tags:
english, 1993
12
Laser-assisted particle removal from silicon surfaces
S.J. Lee
,
K. Imen
,
S.D. Allen
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 827 KB
Your tags:
english, 1993
13
A thermal detachment mechanism for particle removal from surfaces by pulsed laser irradiation
J.D. Kelley
,
F.E. Hovis
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 888 KB
Your tags:
english, 1993
14
“Laser cleaning” removes particles from surfaces
W. Zapka
,
W. Ziemlich
,
W.P. Leung
,
A.C. Tam
Journal:
Microelectronic Engineering
Year:
1993
Language:
english
File:
PDF, 1.02 MB
Your tags:
english, 1993
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