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Volume 29; Issue 1-4
Main
Microelectronic Engineering
Volume 29; Issue 1-4
Microelectronic Engineering
Volume 29; Issue 1-4
1
Memory applications based on ferroelectric and high-permittivity dielectric thin films
R.E. Jones Jr.
,
P. Zurcher
,
P. Chu
,
D.J. Taylor
,
Y.T. Lii
,
B. Jiang
,
P.D. Maniar
,
S.J. Gillespie
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 560 KB
Your tags:
english, 1995
2
Integrated ferroelectric structures for information storage and CCD microprocessor devices
V.I. Petrovsky
,
A.S. Sigov
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 562 KB
Your tags:
english, 1995
3
Device processing and integration of ferroelectric thin films for memory applications
H. Achard
,
H. Macé
,
L. Peccoud
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 782 KB
Your tags:
english, 1995
4
Integration of sol-gel PZT with silicon-on-sapphire CMOS circuitry
T. Bland
,
J. Obhi
,
A. Patel
,
P. Kirby
,
M. Robinson
,
J. Kerr
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 219 KB
Your tags:
english, 1995
5
Direct-contact ferroelectric capacitors for memory applications
G.J.M. Dormans
,
J.H.H.M. Kemperman
,
R.A.M. Wolters
,
P.J. van Veldhoven
,
M.S. de Keijser
,
R.B.F. Janssen
,
M.J.E. Ulenaers
,
P.K. Larsen
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 287 KB
Your tags:
english, 1995
6
Some physical and technological aspects of designing of ferroelectric non-volatile SRAM
V.V. Lemanov
,
Yu.V. Frolov
,
A.A. Iofan
,
V.K. Yarmarkin
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 317 KB
Your tags:
english, 1995
7
Ferroelectric capacitors for integrated circuits
K.A. Vorotilov
,
M.I. Yanovskaya
,
L.I. Solovjeva
,
A.S. Valeev
,
V.I. Petrovsky
,
V.A. Vasiljev
,
I.E. Obvinzeva
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 273 KB
Your tags:
english, 1995
8
Reactive ion etching of Pt/PZT/Pt ferroelectric thin film capacitors in high density DECR plasma
H. Macé
,
H. Achard
,
L. Peccoud
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 285 KB
Your tags:
english, 1995
9
Microelectromechanical systems based on ferroelectric thin films
Dennis L. Polla
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 539 KB
Your tags:
english, 1995
10
Integrated thin film PZT pyroelectric detector arrays
N.M. Shorrocks
,
A. Patel
,
M.J. Walker
,
A.D. Parsons
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 607 KB
Your tags:
english, 1995
11
Characterization of PZT thin films for micromotors
P. Muralt
,
A. Kholkin
,
M. Kohli
,
T. Maeder
,
N. Setter
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 278 KB
Your tags:
english, 1995
12
The use of composite piezoelectric thick films for actuation and control of miniature cantilevers
DFL Jenkins
,
MJ Cunningham
,
WW Clegg
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 294 KB
Your tags:
english, 1995
13
Thermal simulation of micromachined bridges for integrated pyroelectric sensor arrays
B. Ploss
,
D. Lienhard
,
F. Sieber
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 329 KB
Your tags:
english, 1995
14
Two ways to pyroelectric P(VDF/TrFE) thin film sensors and arrays
R. Köhler
,
N. Neumann
,
R. Gottfried-Gottfried
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 440 KB
Your tags:
english, 1995
15
Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor
D. Setiadi
,
P.P.L. Regtien
,
P.M. Sarro
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 290 KB
Your tags:
english, 1995
16
Fabrication and pyroelectric response of a hybrid pyroelectric detector based on epitaxial K0.9Na0.1Ta0.6Nb0.4O3 thin films
H. Pierhöfer
,
Z. Sitar
,
T. Dietrich
,
F. Gitmans
,
P. Günter
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 290 KB
Your tags:
english, 1995
17
Processing and properties of thin film pyroelectric devices
M. Kohli
,
Y. Huang
,
T. Maeder
,
C. Wuethrich
,
A. Bell
,
P. Muralt
,
N. Setter
,
P. Ryser
,
M. Forster
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 296 KB
Your tags:
english, 1995
18
Pyroelectric properties of thin ferroelectric films and their applications for integrated circuits
E.Ph. Pevtsov
,
M.I. Maleto
,
V.I. Petrovsky
,
A.S. Sigov
,
V.V. Chernokozhin
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 298 KB
Your tags:
english, 1995
19
Thin nickel films as absorbers in pyroelectric sensor arrays
D. Lienhard
,
F. Heepmann
,
B. Ploss
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 282 KB
Your tags:
english, 1995
20
Epitaxial growth of LiNbO3 thin films on (001) sapphire by Pulsed Laser Deposition
P. Aubert
,
G. Garry
,
R. Bisaro
,
J. Olivier
,
J. Garcia Lopez
,
C. Urlacher
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 270 KB
Your tags:
english, 1995
21
Structural and electrical properties of laser ablated epitaxial niobium doped lead-zirconium-titanate thin films
C. Björmander
,
K. Sreenivas
,
M. Duan
,
A.M. Grishin
,
K.V. Rao
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 307 KB
Your tags:
english, 1995
22
Preparation of Pb(Mg13Nb23)O3PbTiO3 thin films on silicon substrates by pulsed laser deposition
C. Tantigate
,
A. Safari
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 286 KB
Your tags:
english, 1995
23
Ferroelectric properties of epitaxial PbTiO3/YBa2Cu3O7-δ/SrTiO3 thin film heterostructure
K. Sreenivas
,
C. Björmander
,
A.M. Grishin
,
K.V. Rao
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 217 KB
Your tags:
english, 1995
24
Structural and electrical characterization of sputter-deposited SrTiO3 thin films
Lynnette D. Madsen
,
C.Niclas L. Johnson
,
Sissel N. Jacobsen
,
Ulf Helmersson
,
Staffan Rudner
,
Ivan Ivanov
,
Lars-David Wernlund
,
Lars Ryen
,
Eva Olsson
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 397 KB
Your tags:
english, 1995
25
Growth and properties of epitaxial ferroelectric/superconductor heterostructures
Yu. Boikov
,
Z.G. Ivanov
,
A.N. Kiselev
,
A.L. Vasiliev
,
E. Olsson
,
T. Claeson
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 327 KB
Your tags:
english, 1995
26
Domain-wall and intrinsic contributions to the dielectric response of epitaxial ferroelectric films
N.A. Pertsev
,
G. Arlt
,
A.G. Zembilgotov
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 432 KB
Your tags:
english, 1995
27
Transient modeling of ferroelectric capacitors for semiconductor memories
Ali Sheikholeslami
,
P.Glenn Gulak
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 326 KB
Your tags:
english, 1995
28
Characterisation of the fatigued state of ferroelectric PZT thin-film capacitors
E.L. Colla
,
A.L. Kholkin
,
D. Taylor
,
A.K. Tagantsev
,
K.G. Brooks
,
N. Setter
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 346 KB
Your tags:
english, 1995
29
Experimental study and modeling of switching processes in ferroelectric thin films
V.I. Petrovsky
,
E.Ph. Pevtsov
,
A.S. Sigov
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 277 KB
Your tags:
english, 1995
30
Switching kinetics in epitaxial PZT thin films
V.Ya. Shur
,
S.D. Makarov
,
N.Yu. Ponomarev
,
V.V. Volegov
,
N.A. Tonkachyova
,
L.A. Suslov
,
N.N. Salashchenko
,
E.V. Kluenkov
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 345 KB
Your tags:
english, 1995
31
Sol-gel processing of perovskite thin films
D. Sporn
,
S. Merklein
,
W. Grond
,
S. Seifert
,
S. Wahl
,
A. Berger
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 583 KB
Your tags:
english, 1995
32
Preparation and properties of Pb(Zn13Nb23)O3PbTiO3 thin films by metalorganic chemical vapor deposition
Youichi Kamisuki
,
Toru Taniguchi
,
Tadashi Takenaka
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 270 KB
Your tags:
english, 1995
33
MOCVD of ferroelectric PLZT thin films and their properties
M. Shimizu
,
H. Fujisawa
,
T. Shiosaki
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 279 KB
Your tags:
english, 1995
34
In-situ sputter deposition of PT and PZT films on Platinum and RuO2 electrodes
T. Maeder
,
P. Muralt
,
L. Sagalowicz
,
N. Setter
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 249 KB
Your tags:
english, 1995
35
Sputtering of ferroelectric (PbCa)TiO3 films
H. Schmitt
,
J. Mendiola
,
F. Carmona
,
C. Alemany
,
B. Jimenez
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 265 KB
Your tags:
english, 1995
36
Sol-gel and MOD processing of layered perovskite and SrTiO3 films
M. Klee
,
U. Mackens
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 300 KB
Your tags:
english, 1995
37
Coating uniformity and device applicability of spin coated sol-gel PZT films
D.P. Birnie III
,
R.N. Vogt
,
M.N. Orr
,
J.R. Schifko
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 293 KB
Your tags:
english, 1995
38
Measurement of carbon contamination in barium strontium titanate films
Warren B. Stannard
,
Peter N. Johnston
,
James F. Scott
,
Ian F. Bubb
,
R. Walker
,
David D. Cohen
,
Nick Dytlewski
,
Jarrod W. Martin
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 229 KB
Your tags:
english, 1995
39
Pyrochlore-perovskite phase development of sol-gel derived modified lead titanate thin films
M.L. Calzada
,
J. Mendiola
,
F. Carmona
,
R. Sirera
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 255 KB
Your tags:
english, 1995
40
Characterization of lithium tantalate thin films sputter-deposited onto RuO2Si substrates
C.-H. Kohli
,
J. Moser
,
K. Prasad
,
P.E. Schmid
,
F. Lévy
,
G. Burri
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 266 KB
Your tags:
english, 1995
41
Deposition of PbTiO3 thin films from thd-complexes by an aerosol source MOCVD method
I.E. Korsakov
,
A.R. Kaul
,
L. Klippe
,
J. Korn
,
U. Krause
,
M. Pulver
,
G. Wahl
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 287 KB
Your tags:
english, 1995
42
Pulsed laser deposition of Ca modified PbTiO3 thin films
J. Mendiola
,
M.J. Martin
,
P. Ramos
,
C. Zaldo
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 239 KB
Your tags:
english, 1995
43
Simple composition control of ferroelectric thin films grown by sputtering with an original oxides target design
D. Remiens
,
M. Descamps
,
B. Jaber
,
B. Thierry
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 264 KB
Your tags:
english, 1995
44
Influence of the Pt electrode on the properties of sol-gel PZT-films
Geert J. Willems
,
Dirk J. Wouters
,
Herman E. Maes
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 298 KB
Your tags:
english, 1995
45
La0.5Sr0.5CoO3 electrode technology for Pb(Zr,Ti)O3 thin film nonvolatile memories
B.A. Tuttle
,
H.N. Al-Shareef
,
W.L. Warren
,
M.V. Raymond
,
T.J. Headley
,
J.A. Voigt
,
J. Evans
,
R. Ramesh
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 509 KB
Your tags:
english, 1995
46
Pt electrode investigation and electrical properties of RF magnetron sputtered Pb(Zr,Ti)O3
B. Ea Kim
,
F. Varnière
,
B. Agius
,
R. Bisaro
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 272 KB
Your tags:
english, 1995
47
Stresses in Ru/PbZr0.4Ti0.6O3/Ru thin film stacks for integrated ferroelectric capacitors
G.A.C.M. Spierings
,
J.M. Breed
,
M.J.E. Ulenaers
,
P.J. van Veldhoven
,
P.K. Larsen
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 294 KB
Your tags:
english, 1995
48
Characterization of rapid thermal annealed ruthenium oxide electrodes for PZT ferroelectrics
L. Weaver
,
E.M. Griswold
,
D.S. McIntyre
,
M. Sayer
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 213 KB
Your tags:
english, 1995
49
PT(PbTiO3) buffer layer effects on the electrical properties of Pb(Zr,Ti)O3 thin films
Neung-Ho Cho
,
Ho-Gi Kim
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 264 KB
Your tags:
english, 1995
50
Electrical conductivity in ferroelectric thin films
Dirk J. Wouters
,
Geert J. Willems
,
Herman E. Maes
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 542 KB
Your tags:
english, 1995
51
Procedure of microwave investigations of ferroelectric films and tunable microwave devices based on ferroelectric films
A.B. Kozyrev
,
V.N. Keis
,
G. Koepf
,
R. Yandrofski
,
O.I. Soldatenkov
,
K.A. Dudin
,
D.P. Dovgan
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 231 KB
Your tags:
english, 1995
52
Interferometric study of piezoelectric degradation in ferroelectric thin films
A. Kholkin
,
E. Colla
,
K. Brooks
,
P. Muralt
,
M. Kohli
,
T. Maeder
,
D. Taylor
,
N. Setter
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 327 KB
Your tags:
english, 1995
53
Electron emission of Ca modified PbTiO3 thin films
K. Biedrzycki
,
L. Markowski
,
M.L. Calzada
,
J. Mendiola
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 290 KB
Your tags:
english, 1995
54
Effect of Nb doping on the hysteresis parameters of sol-gel derived Pb1.1−x2(Zr0.53TiO0.47)1−xNbxO3 thin films
Radosveta D. Klissurska
,
Alexander K. Tagantsev
,
Keith G. Brooks
,
Nava Setter
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 292 KB
Your tags:
english, 1995
55
Microstructural characterisation of ferroelectric thin films in transverse section
Ian M. Reaney
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 542 KB
Your tags:
english, 1995
56
Texture, structure and domain microstructure of ferroelectric PZT thin films
J. Hector
,
N. Floquet
,
J.C. Niepce
,
P. Gaucher
,
J.P. Ganne
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 329 KB
Your tags:
english, 1995
57
Structure and properties of LiTaO3 thin films grown by modified gas source molecular beam epitaxy
F. Gitmans
,
Z. Sitar
,
P. Günter
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 290 KB
Your tags:
english, 1995
58
Investigation of Pb(Zr0.70Ti0.30)O3 thin films of different textures on TiPt electrodes
Keith Brooks
,
Radosveta Klissurska
,
Pedro Moeckli
,
Nava Setter
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 270 KB
Your tags:
english, 1995
59
Microstructure of PZT sol-gel films on Pt substrates with different adhesion layers
Radosveta D. Klissurska
,
Thomas Maeder
,
Keith G. Brooks
,
Nava Setter
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 267 KB
Your tags:
english, 1995
60
Quantitative study of the microstructure of Sm substituted lead titanate thin films
L. Pardo
,
J. Ricote
,
R. Sirera
,
M.L. Calzada
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 322 KB
Your tags:
english, 1995
61
The scanning electron microscopy investigation of LiTaO3 thin films on silicon substrates
V.T. Volkov
,
L.S. Kokhanchik
,
V.N. Matveev
,
S.V. Nosenko
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 250 KB
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english, 1995
62
Determination of optical properties of lead based ferroelectrics thin films for integrated optics applications
E. Dogheche
,
B. Jaber
,
D. Rémiens
,
B. Thierry
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 335 KB
Your tags:
english, 1995
63
Studies of optical waveguide barium sodium niobate thin films
M.S. Zhang
,
Z. Yin
,
P. Zhang
,
J.M. Liu
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 289 KB
Your tags:
english, 1995
64
Optical losses in sol-gel derived lead lanthanum titanate waveguides
G. Teowee
,
S. Motakef
,
T.J. Bukowski
,
J.M. Boulton
,
D.P. Birnie III
,
D.R. Uhlmann
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 299 KB
Your tags:
english, 1995
65
Electro-optic properties of sol-gel derived PZT and PLZT thin films
G. Teowee
,
J.T. Simpson
,
Tianji Zhao
,
M. Mansuripur
,
J.M. Boulton
,
D.R. Uhlmann
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 250 KB
Your tags:
english, 1995
66
Editorial Board
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 64 KB
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english, 1995
67
Preface
P.K. Larsen
,
G.J.M. Dormans
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 82 KB
Your tags:
english, 1995
68
Author index
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 467 KB
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english, 1995
69
Transmission electron microscopy of epitaxial SrTiO3 films on LaAlO3 substrates
L. Ryen
,
E. Olsson
,
L.D. Madsen
,
C.N. Johnson
,
X. Wang
,
S.N. Jacobsen
,
U. Helmersson
,
S. Rudner
,
L.-D. Wernlund
Journal:
Microelectronic Engineering
Year:
1995
Language:
english
File:
PDF, 266 KB
Your tags:
english, 1995
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