Volume 10; Issue 6-7

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Microsystem Technologies
Volume 10; Issue 6-7

Microsystem Technologies

Volume 10; Issue 6-7

1

Production of identical pyramid wavefront sensors for multi-conjugate adaptive optic systems using the LIGA process

F. Pérennès, M. Ghigo, M. Tormen, S. Cabrini

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 293 KB

english, 2004

2

Micro gas bearings fabricated by deep X-ray lithography

D. Kim, S. Lee, Y. Jin, Y. Desta, M. D. Bryant, J. Goettert

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 465 KB

english, 2004

3

Effects of microstructure on the mechanical properties of copper films for high aspect ratio structures

M. J. Cordill, T. Muppidi, N. R. Moody, D. F. Bahr

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 372 KB

english, 2004

4

Combination of thick resist and electroforming technologies for monolithic inkjet application

C. K. Chung, C. J. Lin, C. C. Chen, Y. J. Fang, M. Q. Tsai

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 469 KB

english, 2004

5

Selection of mold materials for electroforming of monolithic two-layer microstructure

C. K. Chung, C. J. Lin, L. H. Wu, Y. J. Fang, Y. Z. Hong

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 326 KB

english, 2004

6

Two-dimensional modeling of nickel electrodeposition in LIGA microfabrication

K. S. Chen, G. H. Evans

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 786 KB

english, 2004

7

Effect of workpiece springback on micromilling forces

C. R. Friedrich, V. P. Kulkarni

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 472 KB

english, 2004

8

Active positioning device for a perimodiolar cochlear electrode array

B. Y. Arcand, P. T. Bhatti, N. V. Butala, J. Wang, C. R. Friedrich, K. D. Wise

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 385 KB

english, 2004

9

Replication of LIGA structures using microcasting

G. Baumeister, R. Ruprecht, J. Hausselt

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 447 KB

english, 2004

10

Determination of mechanical properties of slip cast, micro powder injection moulded and microcast high aspect ratio microspecimens

M. Auhorn, T. Beck, V. Schulze, D. Löhe

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 252 KB

english, 2004

11

Deep sub micron high aspect ratio polymer structures produced by hard X-ray lithography

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 358 KB

english, 2004

12

Electrodeposited nickel–manganese: an alloy for microsystem applications

S. H. Goods, J. J. Kelly, N. Y. C. Yang

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 575 KB

english, 2004

13

The mechanical properties, dimensional tolerance and microstructural characterization of micro-molded ceramic and metal components

T. J. Garino, A. M. Morales, B. L. Boyce

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 319 KB

english, 2004

14

The role of microstructure in the electrical and thermal conductivity of Ni-alloys for LIGA microsystems

S. Graham, J. Kelley, N. Yang, T. Borca-Tasciuc

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 522 KB

english, 2004

15

High density and through wafer copper interconnections and solder bumps for MEMS wafer-level packaging

C.-J. Lin, M.-T. Lin, S.-P. Wu, F.-G. Tseng

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 447 KB

english, 2004

16

A Micro corona motor fabricated by a SU-8 built-on X-ray mask

S. Lee, D. Kim, Y. Jin, Y. Han, Y. Desta, M. D. Bryant, J. Goettert

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 361 KB

english, 2004

17

Shape deviations in masks for optical structures produced by electron beam lithography

A. Last, H. Hein, J. Mohr

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 244 KB

english, 2004

18

Replication of microlens arrays by injection molding

B.-K. Lee, D. S. Kim, T. H. Kwon

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 339 KB

english, 2004

19

Fabrication of grids and collimators using SU-8 as a mold

O. V. Makarova, V. N. Zyryanov, R. Divan, D. C. Mancini, C.-M. Tang

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 263 KB

english, 2004

20

Fabrication of focused two-dimensional grids

O. V. Makarova, D. C. Mancini, N. Moldovan, R. Divan, V. N. Zyryanov, C.-M. Tang

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 235 KB

english, 2004

21

SOI wafer mold with high-aspect-ratio microstructures for hot embossing process

Y. Zhao, T. Cui

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 221 KB

english, 2004

22

Replication of micro components by different variants of injection molding

V. Piotter, N. Holstein, K. Plewa, R. Ruprecht, J. Hausselt

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 459 KB

english, 2004

23

Metrology of high aspect ratio MEMS

J. F. Nichols, T. R. Kurfess

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 210 KB

english, 2004

24

High-aspect-ratio microstructure filling by centrifugal force field modeling

T.-H. Tsai, H. Yang, R. Chein

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 326 KB

english, 2004

25

High aspect ratio spiral and vertical meander micro coils for actuator applications

V. Seidemann, T. Kohlmeier, M. Föhse, H. H. Gatzen, S. Büttgenbach

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 418 KB

english, 2004

26

Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography

H. Sato, Y. Houshi, S. Shoji

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 270 KB

english, 2004

27

Evaluation of optical qualities of a LIGA-spectrometer in SU-8

T. Mappes, S. Achenbach, A. Last, J. Mohr, R. Truckenmüller

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 214 KB

english, 2004

28

Preface: Harmst2003

Journal:

Microsystem Technologies

Year:

2004

Language:

english

File:

PDF, 61 KB

english, 2004