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Volume 10; Issue 6-7
Main
Microsystem Technologies
Volume 10; Issue 6-7
Microsystem Technologies
Volume 10; Issue 6-7
1
Production of identical pyramid wavefront sensors for multi-conjugate adaptive optic systems using the LIGA process
F. Pérennès
,
M. Ghigo
,
M. Tormen
,
S. Cabrini
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 293 KB
Your tags:
english, 2004
2
Micro gas bearings fabricated by deep X-ray lithography
D. Kim
,
S. Lee
,
Y. Jin
,
Y. Desta
,
M. D. Bryant
,
J. Goettert
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 465 KB
Your tags:
english, 2004
3
Effects of microstructure on the mechanical properties of copper films for high aspect ratio structures
M. J. Cordill
,
T. Muppidi
,
N. R. Moody
,
D. F. Bahr
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 372 KB
Your tags:
english, 2004
4
Combination of thick resist and electroforming technologies for monolithic inkjet application
C. K. Chung
,
C. J. Lin
,
C. C. Chen
,
Y. J. Fang
,
M. Q. Tsai
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 469 KB
Your tags:
english, 2004
5
Selection of mold materials for electroforming of monolithic two-layer microstructure
C. K. Chung
,
C. J. Lin
,
L. H. Wu
,
Y. J. Fang
,
Y. Z. Hong
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 326 KB
Your tags:
english, 2004
6
Two-dimensional modeling of nickel electrodeposition in LIGA microfabrication
K. S. Chen
,
G. H. Evans
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 786 KB
Your tags:
english, 2004
7
Effect of workpiece springback on micromilling forces
C. R. Friedrich
,
V. P. Kulkarni
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 472 KB
Your tags:
english, 2004
8
Active positioning device for a perimodiolar cochlear electrode array
B. Y. Arcand
,
P. T. Bhatti
,
N. V. Butala
,
J. Wang
,
C. R. Friedrich
,
K. D. Wise
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 385 KB
Your tags:
english, 2004
9
Replication of LIGA structures using microcasting
G. Baumeister
,
R. Ruprecht
,
J. Hausselt
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 447 KB
Your tags:
english, 2004
10
Determination of mechanical properties of slip cast, micro powder injection moulded and microcast high aspect ratio microspecimens
M. Auhorn
,
T. Beck
,
V. Schulze
,
D. Löhe
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 252 KB
Your tags:
english, 2004
11
Deep sub micron high aspect ratio polymer structures produced by hard X-ray lithography
S. Achenbach
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 358 KB
Your tags:
english, 2004
12
Electrodeposited nickel–manganese: an alloy for microsystem applications
S. H. Goods
,
J. J. Kelly
,
N. Y. C. Yang
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 575 KB
Your tags:
english, 2004
13
The mechanical properties, dimensional tolerance and microstructural characterization of micro-molded ceramic and metal components
T. J. Garino
,
A. M. Morales
,
B. L. Boyce
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 319 KB
Your tags:
english, 2004
14
The role of microstructure in the electrical and thermal conductivity of Ni-alloys for LIGA microsystems
S. Graham
,
J. Kelley
,
N. Yang
,
T. Borca-Tasciuc
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 522 KB
Your tags:
english, 2004
15
High density and through wafer copper interconnections and solder bumps for MEMS wafer-level packaging
C.-J. Lin
,
M.-T. Lin
,
S.-P. Wu
,
F.-G. Tseng
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 447 KB
Your tags:
english, 2004
16
A Micro corona motor fabricated by a SU-8 built-on X-ray mask
S. Lee
,
D. Kim
,
Y. Jin
,
Y. Han
,
Y. Desta
,
M. D. Bryant
,
J. Goettert
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 361 KB
Your tags:
english, 2004
17
Shape deviations in masks for optical structures produced by electron beam lithography
A. Last
,
H. Hein
,
J. Mohr
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 244 KB
Your tags:
english, 2004
18
Replication of microlens arrays by injection molding
B.-K. Lee
,
D. S. Kim
,
T. H. Kwon
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 339 KB
Your tags:
english, 2004
19
Fabrication of grids and collimators using SU-8 as a mold
O. V. Makarova
,
V. N. Zyryanov
,
R. Divan
,
D. C. Mancini
,
C.-M. Tang
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 263 KB
Your tags:
english, 2004
20
Fabrication of focused two-dimensional grids
O. V. Makarova
,
D. C. Mancini
,
N. Moldovan
,
R. Divan
,
V. N. Zyryanov
,
C.-M. Tang
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 235 KB
Your tags:
english, 2004
21
SOI wafer mold with high-aspect-ratio microstructures for hot embossing process
Y. Zhao
,
T. Cui
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 221 KB
Your tags:
english, 2004
22
Replication of micro components by different variants of injection molding
V. Piotter
,
N. Holstein
,
K. Plewa
,
R. Ruprecht
,
J. Hausselt
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 459 KB
Your tags:
english, 2004
23
Metrology of high aspect ratio MEMS
J. F. Nichols
,
T. R. Kurfess
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 210 KB
Your tags:
english, 2004
24
High-aspect-ratio microstructure filling by centrifugal force field modeling
T.-H. Tsai
,
H. Yang
,
R. Chein
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 326 KB
Your tags:
english, 2004
25
High aspect ratio spiral and vertical meander micro coils for actuator applications
V. Seidemann
,
T. Kohlmeier
,
M. Föhse
,
H. H. Gatzen
,
S. Büttgenbach
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 418 KB
Your tags:
english, 2004
26
Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography
H. Sato
,
Y. Houshi
,
S. Shoji
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 270 KB
Your tags:
english, 2004
27
Evaluation of optical qualities of a LIGA-spectrometer in SU-8
T. Mappes
,
S. Achenbach
,
A. Last
,
J. Mohr
,
R. Truckenmüller
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 214 KB
Your tags:
english, 2004
28
Preface: Harmst2003
Jill Hruby
Journal:
Microsystem Technologies
Year:
2004
Language:
english
File:
PDF, 61 KB
Your tags:
english, 2004
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