Volume 2; Issue 3

Microsystem Technologies

Volume 2; Issue 3
3

Fabrication of monolithic integrated fiber-lens connector arrays by deep proton irradiation

M. Kufner, S. Kufner
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 711 KB
english, 1996
4

The strategic development of HARM manufacturing technologies

S. T. Walsh, R. Boylan, R. Warrington, W. Carr, J. Elders
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 335 KB
english, 1996
5

LIGA technology in BSRF

E. Tang, F. Yi, M. Jin
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 1.52 MB
english, 1996
6

Development of ceramic microstructures

H.-J. Ritzhaupt-Kleissl, W. Bauer, E. Günther, J. Laubersheimer, J. Haußelt
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 1.68 MB
english, 1996
7

Ceramic microstructures and potential applications

R. Knitter, E. Günther, C. Odemer, U. Maciejewski
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 1.79 MB
english, 1996
8

A variable reluctance stepping microdynamometer

T. R. Christenson, H. Guckel, J. Klein
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 1.30 MB
english, 1996
9

The micromilling process for high aspect ratio microstructures

C. R. Friedrich, M. J. Vasile
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 730 KB
english, 1996
10

Movable microstructures made by a sub-micron LIGA process

M. W. Börner, M. Kohl, F. J. Pantenburg, W. Bacher, H. Hein, W. K. Schomburg
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 1.81 MB
english, 1996
11

LIGA and LIGA-like processing with high energy photons

H. Guckel
Journal:
Microsystem Technologies
Year:
1996
Language:
english
File:
PDF, 701 KB
english, 1996