Volume 6; Issue 1

Microsystem Technologies

Volume 6; Issue 1
2

Electric field breakdown at micrometre separations in air and vacuum

Year:
1999
Language:
english
File:
PDF, 272 KB
english, 1999
3

Reactive ion etching for the production of metal microstructures by hot embossing

Year:
1999
Language:
english
File:
PDF, 346 KB
english, 1999