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Volume 6; Issue 4
Main
Microsystem Technologies
Volume 6; Issue 4
Microsystem Technologies
Volume 6; Issue 4
1
Adhesion of Ni-structures on Al2O3ceramic substrates used for the sacrificial layer technique
Th. Kunz
,
J. Mohr
,
A. Ruzzu
,
K. D. Skrobanek
,
U. Wallrabe
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 549 KB
Your tags:
english, 2000
2
Superplastic extrusion of microgear shaft of 10 μm in module
Y. Saotome
,
H. Iwazaki
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 334 KB
Your tags:
english, 2000
3
A new control method for the relative dielectric constant of 1–3 piezoelectric composites realized with the LIGA process
T. Numazawa
,
Y. Hirata
,
H. Takada
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 251 KB
Your tags:
english, 2000
4
Deep ion projection lithography in PMMA: Substrate heating and ion energy concerns
M. Lindeberg
,
J. Buckley
,
G. Possnert
,
K. Hjort
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 526 KB
Your tags:
english, 2000
5
Etching through silicon wafer in inductively coupled plasma
S. Franssila
,
J. Kiihamäki
,
J. Karttunen
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 395 KB
Your tags:
english, 2000
6
Cost estimation for LIGA fabrication flows using process design methods
K. Hahn
,
R. Brück
,
A. Priebe
,
C. Schneider
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 315 KB
Your tags:
english, 2000
7
A micro cycloid-gear system fabricated by multi-exposure LIGA technique
S. J. Chung
,
H. Hein
,
T. Hirata
,
J. Mohr
,
T. Akashi
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 530 KB
Your tags:
english, 2000
8
A new sacrificial layer method of LIGA technology to fabricate movable part of a gripper
F. Yi
,
E. Tang
,
J. Zhang
,
D. Xian
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 188 KB
Your tags:
english, 2000
9
Development of microconnector with an automatic connecting/disconnecting mechanism
T. Haga
,
H. Okuyama
,
H. Takada
Journal:
Microsystem Technologies
Year:
2000
Language:
english
File:
PDF, 393 KB
Your tags:
english, 2000
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