Volume 7; Issue 1

Microsystem Technologies

Volume 7; Issue 1
1

SU-8 as resist material for deep X-ray lithography

C. Cremers, F. Bouamrane, L. Singleton, R. Schenk
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 176 KB
english, 2001
4

Fabrication method of spacers with high aspect ratio – Used in a field emission display (FED)

S. Park, M. Kim
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 174 KB
english, 2001
5

Equations of exposure time and X-ray mask absorber thickness in the LIGA process

K. H. Gil, S. S. Lee, Y. Youm
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 120 KB
english, 2001
6

Microcomposite electroforming for LIGA technology

M.-C. Chou, H. Yang, S.-H. Yeh
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 234 KB
english, 2001
7

Laser bending of etched silicon microstructures

E. Gärtner, J. Frühauf, U. Löschner, H. Exner
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 126 KB
english, 2001
9

A flip-chip LIGA assembly technique via electroplating

L.-W. Pan, L. Lin, J. Ni
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 203 KB
english, 2001
10

Consumption-related development in microelectroforming

N. N. Issaev, A. G. Schrodt, C. Khan Malek
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 190 KB
english, 2001