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Volume 7; Issue 1
Main
Microsystem Technologies
Volume 7; Issue 1
Microsystem Technologies
Volume 7; Issue 1
1
SU-8 as resist material for deep X-ray lithography
C. Cremers
,
F. Bouamrane
,
L. Singleton
,
R. Schenk
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 176 KB
Your tags:
english, 2001
2
Gas permeability of adhesives and their application for hermetic packaging of microcomponents
A. Gerlach
,
W. Keller
,
J. Schulz
,
K. Schumacher
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 141 KB
Your tags:
english, 2001
3
Assembly of hybrid integrated micro-optical modules using passive alignment with LIGA mounting elements and adhesive bonding techniques
A. Gerlach
,
P. Ziegler
,
J. Mohr
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 223 KB
Your tags:
english, 2001
4
Fabrication method of spacers with high aspect ratio – Used in a field emission display (FED)
S. Park
,
M. Kim
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 174 KB
Your tags:
english, 2001
5
Equations of exposure time and X-ray mask absorber thickness in the LIGA process
K. H. Gil
,
S. S. Lee
,
Y. Youm
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 120 KB
Your tags:
english, 2001
6
Microcomposite electroforming for LIGA technology
M.-C. Chou
,
H. Yang
,
S.-H. Yeh
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 234 KB
Your tags:
english, 2001
7
Laser bending of etched silicon microstructures
E. Gärtner
,
J. Frühauf
,
U. Löschner
,
H. Exner
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 126 KB
Your tags:
english, 2001
8
Non-adhesive direct bonding of tiny parts by means of ultraprecision trapezoid microgrooves
Y. Takeuchi
,
O. Miyagawa
,
T. Kawai
,
K. Sawada
,
T. Sata
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 338 KB
Your tags:
english, 2001
9
A flip-chip LIGA assembly technique via electroplating
L.-W. Pan
,
L. Lin
,
J. Ni
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 203 KB
Your tags:
english, 2001
10
Consumption-related development in microelectroforming
N. N. Issaev
,
A. G. Schrodt
,
C. Khan Malek
Journal:
Microsystem Technologies
Year:
2001
Language:
english
File:
PDF, 190 KB
Your tags:
english, 2001
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