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Volume 28; Issue 2

Sensors and Actuators A: Physical

Volume 28; Issue 2
1

Preface

Minhang Bao
Journal:
Sensors and Actuators A: Physical
Year:
1991
Language:
english
File:
PDF, 51 KB
english, 1991
2

Pressure sensors merge micromachining and microelectronics

Randy Frank
Journal:
Sensors and Actuators A: Physical
Year:
1991
Language:
english
File:
PDF, 804 KB
english, 1991
3

Stress concentration structure with front beam for pressure sensor

Minhang Bao, Lianzhong Yu, Yan Wang
Journal:
Sensors and Actuators A: Physical
Year:
1991
Language:
english
File:
PDF, 395 KB
english, 1991
4

Surface micromachined pressure transducers

H. Guckel
Journal:
Sensors and Actuators A: Physical
Year:
1991
Language:
english
File:
PDF, 907 KB
english, 1991
6

Epitaxial silicon on zirconia (SOZ) pressure sensor

Qinggui Chen, Weiyuan Wang
Journal:
Sensors and Actuators A: Physical
Year:
1991
Language:
english
File:
PDF, 249 KB
english, 1991
7

Piezoresistance effect of silicon

Yozo Kanda
Journal:
Sensors and Actuators A: Physical
Year:
1991
Language:
english
File:
PDF, 732 KB
english, 1991
8

Piezoresistive pressure sensors based on polycrystalline silicon

V. Mosser, J. Suski, J. Goss, E. Obermeier
Journal:
Sensors and Actuators A: Physical
Year:
1991
Language:
english
File:
PDF, 1.06 MB
english, 1991
9

Conference calendar

Journal:
Sensors and Actuators A: Physical
Year:
1991
Language:
english
File:
PDF, 48 KB
english, 1991