Volume 57; Issue 2

Sensors and Actuators A: Physical

Volume 57; Issue 2
1

Friction and pull-off force on silicon surface modified by FIB

Yasuhisa Ando, Jiro Ino
Journal:
Sensors and Actuators A: Physical
Year:
1996
Language:
english
File:
PDF, 493 KB
english, 1996
7

Diffuser-element design investigation for valve-less pumps

Anders Olsson, Go¨ran Stemme, Erik Stemme
Journal:
Sensors and Actuators A: Physical
Year:
1996
Language:
english
File:
PDF, 449 KB
english, 1996
8

Polysilicon micromechanical gratings for optical modulation

D.E. Sene, V.M. Bright, J.H. Comtois, J.W. Grantham
Journal:
Sensors and Actuators A: Physical
Year:
1996
Language:
english
File:
PDF, 480 KB
english, 1996
9

The VAMP — a new device for handling liquids or gases

M. Stehr, S. Messner, H. Sandmaier, R. Zengerle
Journal:
Sensors and Actuators A: Physical
Year:
1996
Language:
english
File:
PDF, 327 KB
english, 1996
10

Micro ultrasonic machining and its applications in MEMS

Xi-Qing Sun, T. Masuzawa, M. Fujino
Journal:
Sensors and Actuators A: Physical
Year:
1996
Language:
english
File:
PDF, 380 KB
english, 1996
11

Conference calendar

Journal:
Sensors and Actuators A: Physical
Year:
1996
Language:
english
File:
PDF, 53 KB
english, 1996