Volume 87; Issue 1-2

Sensors and Actuators A: Physical

Volume 87; Issue 1-2
1

High aspect-ratio polysilicon micromachining technology

Year:
2000
Language:
english
File:
PDF, 2.28 MB
english, 2000
2

On the design of a wide range mini-flow paddlewheel flow sensor

Year:
2000
Language:
english
File:
PDF, 836 KB
english, 2000
3

Shear axial modes in a PCTSCM: Part VI: simpler transmission spectral holes

Year:
2000
Language:
english
File:
PDF, 94 KB
english, 2000
5

Micro-machined electron transparent alumina vacuum windows

Year:
2000
Language:
english
File:
PDF, 2.30 MB
english, 2000
7

A study of nickel silicide film as a mechanical material

Year:
2000
Language:
english
File:
PDF, 1.79 MB
english, 2000
12

Optimization of sensor arrays for beam position estimation

Year:
2000
Language:
english
File:
PDF, 174 KB
english, 2000