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Volume 390; Issue 1-2
Main
Thin Solid Films
Volume 390; Issue 1-2
Thin Solid Films
Volume 390; Issue 1-2
1
LiNb1−xTaxO3 films prepared by thermal plasma spray CVD
Hironori Yamamoto
,
Sergei A. Kulinich
,
Kazuo Terashima
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 131 KB
Your tags:
english, 2001
2
Rapid hard tooling by plasma spraying for injection molding and sheet metal forming
Haiou Zhang
,
Guilan Wang
,
Yunhua Luo
,
Takeo Nakaga
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 1.08 MB
Your tags:
english, 2001
3
Study on mechanism of C–H radicals’ recombination into acetylene in the process of coal pyrolysis in hydrogen plasma
Mingdong Li
,
Yousan Fan
,
Bo Dai
,
Weiwei Deng
,
Xiaolei Liu
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 129 KB
Your tags:
english, 2001
4
Three-dimensional simulation of a plasma jet with transverse particle and carrier gas injection
He-Ping Li
,
Xi Chen
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 176 KB
Your tags:
english, 2001
5
Modeling of the supersonic argon plasma jet at low gas pressure environment
Peng Han
,
Xi Chen
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 215 KB
Your tags:
english, 2001
6
Numerical analysis and experiments on transferred plasma torches for finding appropriate operating conditions and electrode configuration for a waste melting process
Min Hur
,
Tae Hyung Hwang
,
Won Tae Ju
,
Chan Min Lee
,
Sang Hee Hong
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 454 KB
Your tags:
english, 2001
7
Anode mode in cathodic arc deposition apparatus with various cathodes and ambient gases
R Miyano
,
T Saito
,
K Kimura
,
M Ikeda
,
H Takikawa
,
T Sakakibara
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 1.14 MB
Your tags:
english, 2001
8
Optical emission patterns and microwave field distributions in a cylindrical microwave plasma source
Fang Fang
,
Rongqing Liang
,
Qiongrong Ou
,
Yifeng Sui
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 650 KB
Your tags:
english, 2001
9
Production of low electron temperature ECR plasma for plasma processing
Naho Itagaki
,
Yoko Ueda
,
Nobuo Ishii
,
Yoshinobu Kawai
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 174 KB
Your tags:
english, 2001
10
Ion and neutral temperatures in an electron cyclotron resonance plasma
Akira Yonesu
,
Shunjiro Shinohara
,
Yasumasa Yamashiro
,
Yoshinobu Kawai
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 128 KB
Your tags:
english, 2001
11
Synthesis of new ceramics from powder mixtures using thermal plasma processing
Osamu Fukumasa
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 1.17 MB
Your tags:
english, 2001
12
Preparation of ultrafine particles of silicon base intermetallic compound by arc plasma method
Takayuki Watanabe
,
Hajime Itoh
,
Yoshiro Ishii
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 371 KB
Your tags:
english, 2001
13
Microwave plasma enhanced CVD of aluminum oxide films: OES diagnostics and influence of the RF bias
P. Tristant
,
Z. Ding
,
Q.B. Trang Vinh
,
H. Hidalgo
,
J.L. Jauberteau
,
J. Desmaison
,
C. Dong
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 227 KB
Your tags:
english, 2001
14
Quantitative modeling of reactive sputtering process for MgO thin film deposition
Y Matsuda
,
K Otomo
,
H Fujiyama
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 144 KB
Your tags:
english, 2001
15
Characterization of CNx films prepared by twinned ECR plasma source enhanced DC magnetron sputtering
Jun Xu
,
Xinlu Deng
,
Jialiang Zhang
,
Wenqi Lu
,
Tengcai Ma
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 165 KB
Your tags:
english, 2001
16
Pulsed high energy density plasma processing silicon surface
Bin Liu
,
Chizi Liu
,
Dajung Cheng
,
Rui He
,
Si-Ze Yang
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 342 KB
Your tags:
english, 2001
17
Oxidative degradation of acridine orange induced by plasma with contact glow discharge electrolysis
Jinzhang Gao
,
Zhongai Hu
,
Xiaoyan Wang
,
Jingguo Hou
,
Xiaoquan Lu
,
Jingwan Kang
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 109 KB
Your tags:
english, 2001
18
Stabilization of chlorofluorocarbons (CFCs) by plasma copolymerization with hydrocarbon monomers
Osamu Tsuji
,
Takeshi Minaguchi
,
Hirohiko Nakano
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 210 KB
Your tags:
english, 2001
19
A novel pulsed plasma for chemical conversion
Shuiliang Yao
,
Eiji Suzuki
,
Akira Nakayama
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 515 KB
Your tags:
english, 2001
20
A study on the formation and characteristics of the SiOCH composite thin films with low dielectric constant for advanced semiconductor devices
Chang Shil Yang
,
Kyoung Suk Oh
,
Jai Yon Ryu
,
Doo Chul Kim
,
Jing Shou-Yong
,
Chi Kyu Choi
,
Heon-Ju Lee
,
Se Hun Um
,
Hong Young Chang
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 198 KB
Your tags:
english, 2001
21
Localized material growth by a dielectric barrier discharge
Nan Jiang
,
Sheng Fa Qian
,
Long Wang
,
Hou Xian Zhang
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 529 KB
Your tags:
english, 2001
22
Numerical simulation of coating growth and pore formation in rapid plasma spray tooling
Yanxiang Chen
,
Guilan Wang
,
Haiou Zhang
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 1.14 MB
Your tags:
english, 2001
23
Investigation of deposition rate and structure of pulse DC plasma polymers
Jing Zhang
,
William van Ooij
,
Paul France
,
Saswati Datta
,
Arseni Radomyselskiy
,
Hanqun Xie
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 138 KB
Your tags:
english, 2001
24
Surface modification of titanium oxide in pulse-modulated induction thermal plasma
Takamasa Ishigaki
,
Hajime Haneda
,
Nobuhiro Okada
,
Shigeru Ito
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 544 KB
Your tags:
english, 2001
25
BCN nanotubes prepared by a plasma evaporation method
Yusuke Moriyoshi
,
Yoshiki Shimizu
,
Takayuki Watanabe
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 1012 KB
Your tags:
english, 2001
26
Synthesis of fullerenes from carbon powder by using high power induction thermal plasma
C. Wang
,
T. Imahori
,
Y. Tanaka
,
T. Sakuta
,
H. Takikawa
,
H. Matsuo
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 446 KB
Your tags:
english, 2001
27
Characterization of multilayer films of TiAlOCN system prepared by pulsed d.c. plasma-enhanced chemical vapor deposition
Kazuki Kawata
,
Hiroyuki Sugimura
,
Osamu Takai
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 291 KB
Your tags:
english, 2001
28
Preparation of strontium titanate thin films by mirror-confinement-type electron cyclotron resonance plasma sputtering
So Baba
,
Ken Numata
,
Hidenori Saito
,
Masao Kumagai
,
Toshiyuki Ueno
,
Bunkei Kyoh
,
Shoji Miyake
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 861 KB
Your tags:
english, 2001
29
Large-area uniform dust-free plasma CVD
Hiroshi Fujiyama
,
Yoko Maemura
,
Toru Yamaguchi
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 1.20 MB
Your tags:
english, 2001
30
Anomalous behavior of electron temperature in silane glow discharge plasmas
Madoka Takai
,
Tomonori Nishimoto
,
Michio Kondo
,
Akihisa Matsuda
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 751 KB
Your tags:
english, 2001
31
Reduction of carbon impurities in silicon oxide films prepared by rf plasma-enhanced CVD
Katsuya Teshima
,
Yasushi Inoue
,
Hiroyuki Sugimura
,
Osamu Takai
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 358 KB
Your tags:
english, 2001
32
Dissociation process of CH4/H2 gas mixture during EACVD
Lifang Dong
,
Junying Chen
,
Xiaowei Li
,
Lianshui Zhang
,
Li Han
,
Guangsheng Fu
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 139 KB
Your tags:
english, 2001
33
CVD of hard DLC films in a radio frequency inductively coupled plasma source
S.J Yu
,
Z.F Ding
,
J Xu
,
J.L Zhang
,
T.C Ma
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 271 KB
Your tags:
english, 2001
34
Adhesion improvement of diamond films on cemented carbides with copper implant layer
Ma Zhibin
,
Wang Jianhua
,
Wu Qingchong
,
Wang Chuanxin
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 162 KB
Your tags:
english, 2001
35
Synthesis of multi-walled carbon nanotubes by microwave plasma-enhanced chemical vapor deposition
Xizhang Wang
,
Zheng Hu
,
Qiang Wu
,
Xin Chen
,
Yi Chen
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 871 KB
Your tags:
english, 2001
36
Surface reaction processes in C4F8 and C5F8 plasmas for selective etching of SiO2 over photo-resist
Hideki Motomura
,
Shin-ichi Imai
,
Kunihide Tachibana
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 256 KB
Your tags:
english, 2001
37
Dynamic nitrogen and titanium plasma ion implantation/deposition at different bias voltages
Xiubo Tian
,
Langping Wang
,
Qingyu Zhang
,
Paul K Chu
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 523 KB
Your tags:
english, 2001
38
Steady-state direct-current plasma immersion ion implantation using an electron cyclotron resonance plasma source
Xuchu Zeng
,
Paul K Chu
,
Qingchuan Chen
,
Honghui Tong
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 183 KB
Your tags:
english, 2001
39
Ion-burst method for positive and negative ion species measurements
S Yoshimura
,
R Ichiki
,
M Shindo
,
Y Kawai
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 131 KB
Your tags:
english, 2001
40
Characteristics of VHF excited hydrogen plasmas using a ladder-shaped electrode
Y Takeuchi
,
I Kawasaki
,
H Mashima
,
M Murata
,
Y Kawai
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 151 KB
Your tags:
english, 2001
41
Estimate of the negative ion density in reactive gas plasmas
M. Shindo
,
R. Ichiki
,
S. Yoshimura
,
Y. Kawai
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 152 KB
Your tags:
english, 2001
42
Low-frequency modes in two-dimensional Debye-Yukawa plasma crystals
Xiaogang Wang
,
Yue Liu
,
A. Bhattacharjee
,
Shuanghui Hu
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 96 KB
Your tags:
english, 2001
43
Multiple microscale plasma CVD apparatuses on a substrate
Tsuyohito Ito
,
Kazuo Terashima
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 679 KB
Your tags:
english, 2001
44
Dielectric barrier discharge — properties and applications
Xueji Xu
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 191 KB
Your tags:
english, 2001
45
Study on formation process of surface plasma
G.Q Zhang
,
Y.J Ge
,
W.J Yang
,
Z.F Zhao
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 305 KB
Your tags:
english, 2001
46
Subject Index of Volume 390
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 60 KB
Your tags:
english, 2001
47
Author Index of Volume 390
Journal:
Thin Solid Films
Year:
2001
File:
PDF, 35 KB
Your tags:
2001
48
Preface
K. Tachibana
,
T. Watanabe
,
X.-F. Yang
Journal:
Thin Solid Films
Year:
2001
Language:
english
File:
PDF, 36 KB
Your tags:
english, 2001
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