Volume 45; Issue 8

Vacuum

Volume 45; Issue 8
2

The helicoid multi-groove vacuum pump in both viscous and molecular states

Year:
1994
Language:
english
File:
PDF, 632 KB
english, 1994
4

Temperature measurement of samples for study of outgassing by means of a pendulum

Year:
1994
Language:
english
File:
PDF, 388 KB
english, 1994
5

Monte Carlo simulation of molecular beams in a hot-wall epitaxy system

Year:
1994
Language:
english
File:
PDF, 829 KB
english, 1994
6

Structural and material properties of tungsten silicide formed at low temperature

Year:
1994
Language:
english
File:
PDF, 395 KB
english, 1994
9

Code of specification for partial pressure analysers

Year:
1994
Language:
english
File:
PDF, 323 KB
english, 1994
10

Development of distributive pumping

Year:
1994
Language:
english
File:
PDF, 294 KB
english, 1994
11

Thin film metal-insulator-metal structure with a Langmuir-Blodgett overlayer

Year:
1994
Language:
english
File:
PDF, 445 KB
english, 1994
13

Simulation of dry etching through a mask

Year:
1994
Language:
english
File:
PDF, 700 KB
english, 1994
14

Silicon trench etching in a multi-frequency discharge reactor

Year:
1994
Language:
english
File:
PDF, 575 KB
english, 1994
16

Conferences on related topics

Year:
1994
Language:
english
File:
PDF, 119 KB
english, 1994