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Volume 14; Issue 3-4
Main
Chemical Vapor Deposition
Volume 14; Issue 3-4
Chemical Vapor Deposition
Volume 14; Issue 3-4
1
Atomic Layer Deposition of Iron Oxide Thin Films and Nanotubes using Ferrocene and Oxygen as Precursors
Ma˚rten Rooth
,
Anders Johansson
,
Kaupo Kukli
,
Jaan Aarik
,
Mats Boman
,
Anders Hårsta
Journal:
Chemical Vapor Deposition
Year:
2008
Language:
english
File:
PDF, 193 KB
Your tags:
english, 2008
2
Bis(tert-butylimido)-bis(dialkylamido) Complexes of Molybdenum as Atomic Layer Deposition (ALD) Precursors for Molybdenum Nitride: the Effect of the Alkyl Group
Ville Miikkulainen
,
Mika Suvanto
,
Tapani A. Pakkanen
Journal:
Chemical Vapor Deposition
Year:
2008
Language:
english
File:
PDF, 149 KB
Your tags:
english, 2008
3
Thermodynamic Aspects of Diamond/β-SiC Composite Films
Vadali V. S. S. Srikanth
,
Vicente Braz Trindade
,
Thorsten Staedler
,
Xin Jiang
Journal:
Chemical Vapor Deposition
Year:
2008
Language:
english
File:
PDF, 323 KB
Your tags:
english, 2008
4
Atomic Layer Deposition of LaF3 Thin Films using La(thd)3 and TiF4 as Precursors
Tero Pilvi
,
Esa Puukilainen
,
Kai Arstila
,
Markku Leskelä
,
Mikko Ritala
Journal:
Chemical Vapor Deposition
Year:
2008
Language:
english
File:
PDF, 247 KB
Your tags:
english, 2008
5
Cover Picture from Haycock and co-workers (Chem. Vap. Deposition 3–4/2008)
Journal:
Chemical Vapor Deposition
Year:
2008
File:
PDF, 164 KB
Your tags:
2008
6
Contents: (Chem. Vap. Deposition 3–4/2008)
Journal:
Chemical Vapor Deposition
Year:
2008
Language:
english
File:
PDF, 48 KB
Your tags:
english, 2008
7
Author Index and Subject Index Chem. Vap. Deposition 3–4/2008
Journal:
Chemical Vapor Deposition
Year:
2008
Language:
english
File:
PDF, 88 KB
Your tags:
english, 2008
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