Volume 81

5

Integrated Microsystems

Year:
2012
Language:
english
File:
PDF, 1.21 MB
english, 2012
6

History and Recent Progress of MEMS Physical Sensors

Year:
2012
Language:
english
File:
PDF, 2.39 MB
english, 2012
7

Continuous Process for Large-Area Flexible MEMS

Year:
2012
Language:
english
File:
PDF, 2.37 MB
english, 2012
15

Microfluidic Microchemomechanical Systems

Year:
2012
Language:
english
File:
PDF, 2.32 MB
english, 2012