Fundraising September 15, 2024 – October 1, 2024 About fundraising
78

Nanoporous hard etch masks using silicon-containing block copolymer thin films

Year:
2011
Language:
english
File:
PDF, 1.39 MB
english, 2011
85

Acid diffusion control in chemically amplified resists

Year:
1999
Language:
english
File:
PDF, 441 KB
english, 1999
99

Backfill Cycle of a Layered Bed H2 PSA Process

Year:
1999
Language:
english
File:
PDF, 202 KB
english, 1999