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51

SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V - Optimal control strategy using linear programming for load disturbance compensation in thermal processing systems

Ho, Weng Khuen, Tay, Arthur E., Schaper, Charles D., Toprac, Anthony J., Dang, Kim

Year:

1999

Language:

english

File:

PDF, 625 KB

english, 1999

52

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Monday 18 September 2000)] Process Control and Diagnostics - Real-time control of photoresist thickness uniformity during the bake process

Lee-Aquila, Lay Lay, Schaper, Charles D., Ho, Weng Khuen, Miller, Michael L., Ashtiani, Kaihan A.

Year:

2000

Language:

english

File:

PDF, 292 KB

english, 2000

53

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Data Analysis and Modeling for Process Control II - Real-time control of photoresist absorption coefficient uniformity

Tay, Arthur, Emami, Iraj, Ho, Weng-Khuen, Wu, Xiaodong, Tsai, Kuen-Yu

Year:

2005

Language:

english

File:

PDF, 583 KB

english, 2005

54

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Data Analysis and Modeling for Process Control III - Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography

Tay, Arthur, Emami, Iraj, Tobin, Jr., Kenneth W., Ho, Weng-Khuen, Hu, Ni, Tsai, Kuen-Yu, Zhou, Ying

Year:

2006

Language:

english

File:

PDF, 745 KB

english, 2006

55

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Data Analysis and Modeling for Process Control II - Real-time control of photoresist development process

Tay, Arthur, Emami, Iraj, Ho, Weng-Khuen, Kiew, Choon-Meng, Zhou, Ying, Lee, Jay H.

Year:

2005

Language:

english

File:

PDF, 575 KB

english, 2005

56

SPIE Proceedings [SPIE International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 27 November 2000)] Microlithographic Techniques in Integrated Circuit Fabrication II - Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks

Ho, Weng Khuen, Tay, Arthur E., Mack, Chris A., Yuan, XiaoCong

Year:

2000

Language:

english

File:

PDF, 293 KB

english, 2000

57

Indoor Tracking With the Generalized t-Distribution Noise Model

Yin, Le, Liu, Shuo, Ho, Weng Khuen, Ling, Keck Voon

Journal:

IEEE Transactions on Control Systems Technology

Year:

2017

Language:

english

File:

PDF, 4.54 MB

english, 2017

58

Variance analysis of robust state estimation in power system using influence function

Ho, Weng Khuen, Chen, Tengpeng, Ling, Keck Voon, Sun, Lu

Journal:

International Journal of Electrical Power & Energy Systems

Year:

2017

Language:

english

File:

PDF, 684 KB

english, 2017

59

ON CONTROL OF RESIST FILM UNIFORMITY IN THE MICROLITHOGRAPHY PROCESS

Khuen, Ho Weng, Lay, Lee Lay, Schaper, Charles

Journal:

IFAC Proceedings Volumes

Year:

2002

Language:

english

File:

PDF, 159 KB

english, 2002

60

PROCESSING OF SEMICONDUCTOR QUARTZ PHOTOMARKS ON BAKE-PLATES

HO, Weng Khuen, TAY, Arthur, LIM, Khiang Wee

Journal:

IFAC Proceedings Volumes

Year:

2002

Language:

english

File:

PDF, 198 KB

english, 2002

61

Critical Dimension and Real-Time Temperature Control for Warped Wafers

HO, Weng Khuen, TAY, Arthur, FU, Jun, CHEN, Ming, FENG, Yong

Journal:

IFAC Proceedings Volumes

Year:

2008

Language:

english

File:

PDF, 360 KB

english, 2008

62

[ACM Press the 2018 4th International Conference - Valenciennes, France (2018.02.07-2018.02.11)] Proceedings of the 2018 4th International Conference on Mechatronics and Robotics Engineering - ICMRE 2018 - Computational Load Comparison of Multiplexed and Standard Model Predictive Control

Wang, XiaoQiong, Ho, Weng Khuen, Ling, Keck Voon

Year:

2018

Language:

english

File:

PDF, 942 KB

english, 2018

63

Covariance Analysis of LAV Robust Dynamic State Estimation in Power Systems

Sun, Lu, Chen, Tengpeng, Ho, Weng Khuen, Ling, Keck Voon, Maciejowski, Jan M.

Journal:

IEEE Systems Journal

Year:

2019

Language:

english

File:

PDF, 4.69 MB

english, 2019