71

Chemical Vapor Deposition and Properties of Amorphous Aluminum Oxide Films

Year:
1996
Language:
english
File:
PDF, 451 KB
english, 1996
72

Improved Conformality of CVD Titanium Nitride Films

Year:
1998
Language:
english
File:
PDF, 442 KB
english, 1998
74

Liquid Compounds for CVD of Alkaline Earth Metals

Year:
1999
Language:
english
File:
PDF, 773 KB
english, 1999