Characteristic structural features of amorphous hydrated...

Semiconductors 1997 / 07 Vol. 31; Iss. 7

Characteristic structural features of amorphous hydrated silicon films deposited by direct-currect decomposition of silane in a magnetic field

O. A. Golikova, A. N. Kuznetsov, V. Kh. Kudoyarova, M. M. Kazanin
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Volume:
31
Language:
english
Pages:
4
DOI:
10.1134/1.1187067
Date:
July, 1997
File:
PDF, 73 KB
english, 1997
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