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Influence of oxygen on the ion-beam synthesis of silicon carbide buried layers in silicon
V. V. Artamanov, M. Ya. Valakh, N. I. Klyui, V. P. Mel’nik, A. B. Romanyuk, B. N. Romanyuk, V. A. YukhimchukVolume:
32
Language:
english
Pages:
5
DOI:
10.1134/1.1187611
Date:
December, 1998
File:
PDF, 91 KB
english, 1998