Growth ofa-C:H anda-C:H〈Cu〉 films produced by magnetron...

Semiconductors 2000 / 01 Vol. 34; Iss. 1

Growth ofa-C:H anda-C:H〈Cu〉 films produced by magnetron sputtering

T. K. Zvonareva, V. I. Ivanov-Omskii, A. V. Nashchekin, L. V. Sharonova
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Volume:
34
Language:
english
Pages:
6
DOI:
10.1134/1.1187962
Date:
January, 2000
File:
PDF, 330 KB
english, 2000
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